Benchtop SEM Hitachi
Manufacturer and model:
Benchtop SEM, Hitachi TM3030
General Information:
SEM characterization
Key Features:
Samples up to 3"" diameter
Magnification from 15 to 30,000
Acceleration Voltages: 5kV and 15kV
Applications:
Pictures of samples with features smaller than 1µm
Materials:
Si, GaAs, InP, SiO2, Al2O3, etc
Start of Operation Date :October 2017
Edmond J. Safra (Givat-Ram)
Nano Center
Contacts
- Golan Tanami
- golant@savion.huji.ac.il